Fascination About Noohapou
Fascination About Noohapou
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distant spots: Static models are generally positioned remotely, expanding Price and decreasing All round procedure efficiency.
Tool & TCU software program calibration techniques differ exterior check gear not made use of regularly for verifying
With the POU3500, you are able to reach unprecedented leads to etch functionality, chamber uptime, lessened price of possession and fab Place utilization – all even though bettering your course of action dependability.
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This extraordinary system, featuring a small kind aspect, low Cost-of-possession and Dynamic Temperature Handle presented system and equipment engineers a new tool to improve their temperature sensitive processes.
The precision in the POU 3300 allows for independent control of the method fluid temperature to the wafer chuck inside +/- 0.1 °C of established issue, as well as the rapidly reaction time with the procedure allows for max wafer-to-wafer repeatability all through the etch method.
The accuracy of the POU 3500 allows for independent Charge of the procedure fluid temperature towards the wafer chuck inside of +/- 0.1 °C of set place, and also the speedy reaction time on the procedure allows for maximum wafer-to-wafer repeatability all over the etch approach.
Together with the POU3300, you'll be able to achieve unprecedented results in etch effectiveness, chamber uptime, minimized price of possession and fab space utilization – all even though enhancing your method reliability.
the info pertains to the 300mm chamber temperature profile throughout a large element ratio Etch approach, operating at very superior RF electricity problems (~3.8kW). The powerful aspects of this info established are:
LAUDA-Noah is meeting these new issues and it has integrated Electrical power preserving technological innovation in programs which might be pleasant towards the setting and possess a low price to work.
The TEs' can swap straight from heating to cooling, or visa-versa. they are able to switch on & off whilst from the heating or cooling method and might raise or lower the quantity of heating or cooling without switching in any respect.
The POU3300 procedure delivers dynamic temperature control of the procedure read more chamber cathode / electrode / anode and will be synchronized with any etch approach.
Confirmed; TEs' stand for only one Portion of a chiller's layout. The switching & control strategies used by a chiller will effect the TEs' dependability.
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We require a lot less cooling/heating ability for a similar application as a static TCU thanks to our tiny reservoir volume.
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